Vacuum Package

When equipped with different gas supply systems, most tube furnace product lines can be adapted for operation with non-flammable or flammable gases or for vacuum operation.

Function and equipment

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The vacuum package enables the working tube to be evacuated for vacuum operation in tube furnaces. It consists of an intermediate component for the gas outlet, a ball valve, a pressure gauge and a manually operated vacuum pump that is connected to the gas outlet by a corrugated stainless steel hose. A gas-tight furnace system is required for the use of a vacuum package, e.g. with the gas-supply packages 15, 2, 25 or 26. To protect the vacuum pump, only cold stage evacuation is allowed. The pump can then remain switched during the running program. The maximum ultimate pressure in the working tube depends on the type of pump.

  • Single-stage rotary vane pump for an achievable ultimate pressure of approx. 20 mbar
  • Two-stage rotary vane pump for an achievable ultimate pressure of approx. 5 x 10−2 mbar
  • Turbomolecular pump system, consisting of a diaphragm pump with downstream turbomolecular pump for an achievable ultimate pressure of up to approx. 5 x 10−5 mbar (not for models RSRB and RSRC and not in combination with gas supply package 15)

Technical specifications

Model Gas supply system
  1 15 2 25 26 3 4
RD            
R    
RT            
RHTC      
RHTH        
RHTV        
RSH    
RSV    
RSRB        
RSRC        

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